Substrate detergent composition

ABSTRACT

The invention provides a substrate detergent composition used for cleaning a surface of a substrate, comprising: (A) A quaternary ammonium salt: 0.1 to 2.0% by mass; (B) Water: 0.1 to 0.4% by mass; and (C) An organic solvent: 94.0 to 99.8% by mass. There can be provided a substrate detergent composition used for cleaning a surface of a substrate contaminated with a silicone component whose water contact angle is 100° or more.

FIELD OF THE INVENTION

The present invention relates to a substrate detergent composition.

DESCRIPTION OF THE RELATED ART

In recent years, finer substrate processing and higher integrationtechnology has further been developed. Specifically, conventionalmethods for mounting a semiconductor in a 3-dimensional structure areemployed to achieve higher density and larger capacity of a substrate.In fact, a 3-dimensional semiconductor-mounting technology is capable ofproducing a semiconductor obtained by laminating thinned semiconductorchips in a multilayered structure by wire-connecting the same usingthrough silicon vias (TSV).

To achieve this technology, it is necessary to introduce an electrodeforming process for thinning a substrate having a formed semiconductorcircuit by backgrinding and further forming a TSV-containing electrodeon a rear surface.

A system proposed in a substrate-thinning process can be subjected toprocesses such as a backgrinding process and back side electrodesforming process by bonding a substrate in which a semiconductor circuitis formed on a support substrate such as silicon and glass using anadhesive. In fact, one of its technical requirements is to readilyexfoliate the support substrate after completion of the processes, andthereafter it is necessary to remove an adhesive remaining on asubstrate surface in which a semiconductor circuit is formed and tocomplete cleaning of a thin-film semiconductor substrate surface.

Since the above processes are unfortunately subjected to a hightemperature of 150° C. or more, a silicone-based heat-resistant adhesiveis normally employed. In the meantime, when a substrate surface iscleaned using only an organic solvent for dissolving an adhesive, thewater contact angle of the substrate surface is 100° or more. It is thushard to sufficiently remove the adhesive. Therefore, it was assumed thatproblems such as unfavorable bonding of an encapsulant are caused insubsequent semiconductor manufacturing processes.

To overcome these technical disadvantages, introduction of a detergentcomposition capable of sufficiently removing a remaining adhesive with ashort period of time without corrosion of a substrate surface isstrongly desired. Unfortunately, however, it did not lead to developmentof a detergent composition capable of sufficiently cleaning a surface ofa substrate contaminated with a silicone component with a short periodof time (Patent Document 1).

PRIOR ART DOCUMENT Patent Document

Patent Document 1: Japanese Patent Laid-Open Publication No. 2013-010888

SUMMARY OF THE INVENTION

The present invention was made in view of the above situation, and hasan object to provide a substrate detergent composition used for cleaninga surface of a substrate such as a silicon semiconductor substrate, asurface of which is contaminated with e.g. a silicone component whosewater contact angle is 100° or more.

To solve the problems as mentioned above, the present invention providesa substrate detergent composition used for cleaning a surface of asubstrate, comprising:

(A) A quaternary ammonium salt: 0.1 to 2.0% by mass;(B) Water: 0.1 to 0.4% by mass; and(C) An organic solvent: 94.0 to 99.8% by mass.

Use of the above detergent composition can efficiently clean a substratewithout corrosion thereof.

Also, the substrate to be cleaned can be a silicon semiconductorsubstrate whose water contact angle is 100° or more, generally 100 to120°.

That mostly derives from a silicone-based adhesive composition remainingon the substrate surface, and when an elemental analysis on thesubstrate surface is executed using X-ray photoelectron spectroscopydevice, a content of silicon atom derived from silicone-based adhesiveis generally 10% by mass or more, particularly 20% by mass or morerelated to the entire elements detected before cleaning taken as 100% bymass.

Furthermore, a silicon substrate used in the present application can beused for a thin substrate processing step which is used for a package ofcompact semiconductor used to wire a silicon substrate in which acircuit is formed with e.g. a metal wiring. A thinning process can beachieved by attaching a laminated body which forms a polymer adhesive ona support body to a silicon substrate which has normal thickness, and bycutting and polishing a back side of the silicon substrate. Illustrativeexample of the support body includes a glass substrate and a siliconsubstrate.

Furthermore, an adhesive used for thinning process is not necessaryafter the process. Therefore, the adhesive is removed by organicsolvent, however, particularly a silicone-based adhesive is hard toremove, and the adhesive remains 10% by mass or more on the substrate.

Accordingly, a detergent composition of the present invention cansufficiently clean a silicon semiconductor substrate surfacecontaminated with a silicone component whose water contact angle is 100°or more with a short period of time. The water contact angle can bedetermined at less than 100°. Specifically, it is preferable to obtain asubstrate whose water contact angle is reduced to 10 to 30°, preferably10 to 20°. By determining a water contact angle at less than 100°, aneffect such as adhesive strength to an encapsulant can be remarkablyimproved in cases of use for a laminated body of e.g. semiconductorpackage.

In addition, the quaternary ammonium salt is preferablytetraalkylammonium hydroxide, particularly tetraethylammonium hydroxide.

Accordingly, the quaternary ammonium salt is preferably a quaternaryammonium hydroxide.

Preferably, the organic solvent is an organic solvent containing atleast one hydroxyl group in one molecule and contains at least one kindof a saturated aliphatic alcohol having 1 to 8 carbon atoms, a glycolhaving 2 to 16 carbon atoms and a glycol ether having 4 to 20 carbonatoms.

Accordingly, the substrate detergent composition of the presentinvention can contain the above-shown organic solvent.

As described above, by cleaning a substrate such as a siliconsemiconductor substrate using the substrate detergent composition of thepresent invention, a favorable cleaning property can be obtained with ashort period of time to achieve efficient cleaning of a siliconsemiconductor substrate without corrosion thereof, and a durablesubstrate used for a semiconductor package without corrosion of asubstrate surface can be obtained as a thin silicon semiconductorsubstrate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will be described in detail.

As stated above, development of a detergent composition capable ofsufficiently cleaning a substrate such as a silicon semiconductorsubstrate with a short period of time and efficiently and favorablycleaning the same has conventionally been desired.

Inventors of the present invention carried out an extensiveinvestigation to find that a substrate can efficiently be cleanedwithout corrosion thereof using a detergent composition containing aspecific mixture ratio of a quaternary ammonium salt, water and anorganic solvent, and the present invention was accomplished.

The present invention will be described in detail, but it is notrestricted thereto.

The detergent composition of the present invention used for cleaning asurface of a substrate comprises:

(A) A quaternary ammonium salt: 0.1 to 2.0% by mass;(B) Water: 0.1 to 0.4% by mass; and(C) An organic solvent: 94.0 to 99.8% by mass.

Quaternary Ammonium Salt

A quaternary ammonium salt capable of fulfilling the objective of thepresent invention is e.g. a quaternary ammonium hydroxide and aquaternary ammonium chloride. Illustrative example thereof includestetraalkylammonium which contains linear alkyl group having 1 to 5carbon atoms, trialkylhydroxyalkylammonium hydroxide which containsalkyl group having 1 to 5 carbon atoms or hydroxyalkyl group having 1 to5 carbon atoms, tetramethylammonium hydroxide (TMAH), tetraethylammoniumhydroxide (TEAH), tetrapropylammonium hydroxide (TPAH),tetrabutylammonium hydroxide (TBAH), trimethyl(hydroxyethyl)ammoniumhydroxide (commonly named as choline), andtriethyl(hydroxyethyl)ammonium hydroxide. Preferably used out of theabove substances are tetraalkylammonium hydroxide, particularlytetraethylammonium hydroxide (TEAH) in view of cleaning property andstability of a detergent.

Organic Solvent

An organic solvent for fulfilling the objective of the present inventionis not particularly restricted, but contains at least one hydroxyl groupin one molecule. Illustrative example thereof includes a saturatedaliphatic alcohol having 1 to 8 carbon atoms, preferably having 2 to 7carbon atoms, and more preferably having 3 to 6 carbon atoms; a glycolhaving 2 to 16 carbon atoms, preferably having 3 to 14 carbon atoms, andmore preferably having 5 to 12 carbon atoms; and a glycol ether having 4to 20 carbon atoms, 4 to 18 carbon atoms, and 4 to 15 carbon atoms, andone or more solvents can be mixed to use. Illustrative example of thesaturated aliphatic monohydric alcohol includes methanol, ethanol,n-propyl alcohol, isopropyl alcohol, 1-butanol, 2-butanol, isobutylalcohol, tert-butyl alcohol, 1-pentanol, 2-pentanol, 3-pentanol,2-methyl-1-butanol, isopentyl alcohol, sec-butyl alcohol, Cert-pentylalcohol, 3-methyl-2-butanol, neopentyl alcohol, 1-hexanol,2-methyl-1-pentanol, 4-methyl-2-pentanol, 2-ethyl-1-butanol, 1-heptanol,2-heptanol, 3-heptanol, 1-octanol, 2-octanol, 2-ethyl-1-hexanol,cyclohexanol, 1-methylcyclohexanol, 2-methylcyclohexanol,3-methylcyclohexanol, 4-methylcyclohexanol, and 2-ethylhexyl alcohol.Illustrative example of the glycol includes ethylene glycol, propyleneglycol, butylene glycol, hexylene glycol, diethylene glycol, dipropyleneglycol, trimethylene glycol, triethylene glycol, tetramethylene glycol,and tetraethylene glycol. Illustrative example of the glycol etherincludes ethylene glycol monomethyl ether, ethylene glycol monoethylether, ethylene glycol mono n-propyl ether, ethylene glycol mono n-butylether, diethylene glycol monomethyl ether, diethylene glycol monoethylether, diethylene glycol monopropyl ether, diethylene glycol monobutylether, diethylene glycol monohexyl ether, triethylene glycol monomethylether, triethylene glycol monoethyl ether, propylene glycol monomethylether, propylene glycol monoethyl ether, propylene glycol monopropylether, propylene glycol monobutyl ether, dipropylene glycol monomethylether, dipropylene glycol monoethyl ether, tripropylene glycolmonomethyl ether, and 3-methoxy-3-methyl-1-butanol. Preferably used outof the above substances are higher organic solvent having 6 to 12 carbonatoms, particularly propylene glycol monobutyl ether.

To obtain a substrate detergent composition of the present invention,components of a detergent composition can be mixed in no specificmanner. The components may be mixed in an optional order, and 2 or 3components of a basic detergent composition may be blended beforehand.Then, a remaining component may be mixed, or all the components may bemixed altogether.

The detergent composition of the present invention is preferablyproduced so that troubles such as deposition and liquid separation arenot caused.

Specifically, the concentration of a component (A): a quaternaryammonium salt is 0.1 to 2.0% by mass related to the entire components,preferably 0.2 to 1.5% by mass, and more preferably 0.3 to 1.2% by mass.The component (A), if a concentration thereof is under 0.1% by mass,might show an insufficient property of cleaning a thin semiconductorsubstrate surface. In cases where the concentration exceeds 2.0% bymass, the property of cleaning might not be obtained, resulting incorrosion of a silicon semiconductor substrate.

The concentration of a component (B): water is 0.1 to 0.4% by mass,preferably 0.1 to 3.0% by mass, and more preferably 0.5 to 2.5% by mass.The component (B), if a concentration thereof is under 0.1% by mass,might provide an insufficient property of cleaning a thin semiconductorsubstrate surface. In cases where the concentration exceeds 4.0% bymass, the property of cleaning might not be obtained, resulting incorrosion of a silicon semiconductor substrate.

The concentration of a component (C): an organic solvent having at leastone hydroxyl group in one molecule is 94.0 to 99.8% by mass, preferably95.5 to 99.7% by mass, and more preferably 96.3 to 99.6% by mass. Thecomponent (C), if a concentration thereof is under 94.0% by mass, mightfail to dissolve a small amount of an adhesive component, leading toinsufficient property of cleaning. In cases where the concentrationexceeds 99.8% by mass, the effect of cleaning cannot be obtained.

As stated above, the detergent composition can be produced bydetermining an optimal ratio of concentrations of all the components,and other components can optionally be added.

The detergent composition of the present invention is not restricted toa silicon semiconductor substrate, but to a germanium substrate, agallium-arsenic substrate, a gallium-phosphorus substrate, agallium-arsenic-aluminum substrate, an aluminum-plated siliconsubstrate, a copper-plated silicon substrate, a silver-plated siliconsubstrate, a gold-plated silicon substrate, a titanium-plated siliconsubstrate, a silicon nitride film-forming silicon substrate, a siliconoxide film-forming silicon substrate, a polyimide film-forming siliconsubstrate, a glass substrate, a quartz substrate, a liquid crystalsubstrate, and an organic EL substrate.

The present invention which can clean a substrate having normalthickness is particularly effective to a thin substrate processed andcut whose thickness is preferably 20 to 100 μm, more preferably 20 to 70μm.

As a cleaning method, a substrate remaining organic matter such as asilicone resin can be cleaned by immersed in or sprayed with a detergentcomposition of the present invention, preferably washed and dried for 30seconds to 30 minutes, more preferably 1 to 10 minutes. Furthermore, insome cases, it may be heated in view of dispersibility.

Furthermore, the obtained substrate without corrosion further can beperformed plating and sputtering treatment, and used for a compactsemiconductor package.

EXAMPLE

The present invention will be described in more detail with reference toExamples and Comparative Examples, but the present invention is notrestricted thereto.

Production of a substrate

An adhesive layer was formed on an 8-inch silicon semiconductorsubstrate (200 mm in diameter, thickness: 725 μm) with a film thicknessof 10 μm by a spin-coating method, using a silicone resin nonanesolution adhesive. Using an 8-inch glass substrate (a glass wafer) as asupport substrate, the support substrate and a silicon semiconductorsubstrate having an adhesive layer were bonded in a vacuum bondingdevice at 200° C. to produce a laminated body composed of the wafer, theadhesive layer and the support substrate. Thereafter, a back side of thesilicon semiconductor substrate was ground using a grinder, so that thefinal thickness of the substrate was 50 μm. Subsequently, the siliconsemiconductor substrate in a laminated substrate was horizontally fixedand the support substrate was exfoliated. Afterward, the supportsubstrate was immersed in a nonane solution for 6 minutes, and theadhesive layer was removed and dried to produce a cleaning-test siliconsemiconductor substrate. At that time, a water contact angle of thesubstrate surface was 108°, and an elemental analysis on the substratesurface by X-ray photoelectron spectroscopy device showed a content ofsilicon atom was 23%. Note that silicon derived from silicon substratewas excluded from the content of silicon atom.

Example 1

A TMAH pentahydrate (4 g), water (1 g) and a 1-butoxy-2-propanol (95 g)were prepared into a 500 ml flask equipped with an agitator, a coolingunit and a thermometer, agitated at room temperature and the TMAHpentahydrate was dissolved to obtain a detergent composition “A”.

Example 2

A 25% TPAH aqueous solution (4 g) and a 1-propoxy-2-propanol (96 g) wereprepared into a 500 ml flask equipped with an agitator, a cooling unitand a thermometer, and uniformly agitated at room temperature to obtaina detergent composition “B”.

Example 3

A 37% TBAH methanol solution (2.7 g), water (0.3 g) and a 1-butanol (97g) were prepared into a 500 ml flask equipped with an agitator, acooling unit and a thermometer, and uniformly agitated at roomtemperature to obtain a detergent composition “C”.

Example 4

A 35% TEAH aqueous solution (1.5 g) and a 1-butoxy-2-propanol (98.5 g)were prepared into a 500m1 flask equipped with an agitator, a coolingunit and a thermometer, and uniformly agitated at room temperature toobtain a detergent composition “D”.

Example 5

A 35% TEAH aqueous solution (1.5 g), water (0.5 g), a 1-hexanol (49 g)and a 1-butoxy-2-propanol (49 g) were prepared into a 500 ml flaskequipped with an agitator, a cooling unit and a thermometer, anduniformly agitated at room temperature to obtain a detergent composition“E”.

Example 6

A 35% TEAH aqueous solution (2.86 g), water (0.14 g), a dipropyleneglycol (48.5 g) and a 1-butoxy-2-propanol (48.5 g) were prepared into a500 ml flask equipped with an agitator, a cooling unit and athermometer, and uniformly agitated at room temperature to obtain adetergent composition “F”.

Example 7

A 35% TEAH aqueous solution (5.71 g), water (0.09 g), a methanol (47.15g) and a 1-propoxy-2-propanol (47.15 g) were prepared into a 500 mlflask equipped with an agitator, a cooling unit and a thermometer, anduniformly agitated at room temperature to obtain a detergent composition“G”.

Comparative Example 1

A 35% TEAR aqueous solution (0.14 g), water (0.86 g) and a1-butoxy-2-propanol (99 g) were prepared into a 500 ml flask equippedwith an agitator, a cooling unit and a thermometer, and agitated at roomtemperature to obtain a detergent composition “H”.

Comparative Example 2

A TMAH pentahydrate (6 g), water (2 g) and a 1-butoxy-2-propanol (92 g)were prepared into a 500 ml flask equipped with an agitator, a coolingunit and a thermometer, agitated at room temperature, and the TMAHpentahydrate was dissolved to obtain a detergent composition “I”.However, a water layer was separated to obtain no favorable detergentcomposition.

Comparative Example 3

Water (3 g) and a 1-propoxy-2-propanol (97 g) were prepared into a 500ml flask equipped with an agitator, a cooling unit and a thermometer,and uniformly agitated at room temperature to obtain a detergentcomposition “J”.

Comparative Example 4

A 10% TMAH propylene glycol solution (5 g) and a 1-butoxy-2-propanol (95g) were prepared into a 500 ml flask equipped with an agitator, anduniformly agitated at room temperature to obtain a detergent composition“K”.

Examples 1 to 7, Comparative Examples 1 to 4

The silicon semiconductor substrate was cleaned by immersed for 6minutes using the detergent compositions “A” to “K”. Each of thedetergent compositions was evaluated as follows. Table 1 shows a ratioof each composition and the results.

Appearance

The appearance of each detergent composition was visually confirmed. Inconfirmation of such problems as precipitation of deposition andseparation of a water layer, each case was evaluated, using symbols “0”(no problem found) and “x” (problem found).

Evaluation of a Property of Cleaning a surface of a Substrate

The silicon semiconductor substrate produced was cleaned using detergentcompositions “A” to “H”, “J” and “K”. Specifically, after the siliconsemiconductor substrate was immersed in the detergent compositions “A”to “H”, “J” and “K” for a certain period of time, it was washed withpure water for one minute to confirm the water contact angle of asilicon semiconductor substrate surface dried. The water contact anglebefore cleaning was 108°. In cases where the time required for makingthe contact angle under 30° was under 6 minutes, the siliconsemiconductor substrate surface was evaluated with a symbol of “oo”. Incases where the time required for making the contact angle less than 30°was over 6 minutes and under 10 minutes, the silicon semiconductorsubstrate surface was evaluated with symbols of “0”. In cases where thetime required for making the contact angle under 30° 10 minutes or more,the silicon semiconductor substrate surface was evaluated with symbolsof “x”, respectively.

Measurement device: Contact Angle Meter DM-301 manufactured by KyowaInterface Science Co., LTD.

Water Contact Angle After Cleaning of a Substrate Surface

A produced silicon semiconductor substrate was cleaned using detergentcompositions “A” to “H”, “J” and “K”. Specifically, after the siliconsemiconductor substrate was immersed in the detergent compositions “A”to “H”, “J” and “K” for 6 minutes, it was washed-with pure water for oneminute to confirm the water contact angle of a silicon semiconductorsubstrate surface dried using above-mentioned device.

Substrate Surface Analysis After Cleaning

A produced silicon semiconductor substrate was cleaned using detergentcompositions “A” to “H”, “J” and “K”. Specifically, after the siliconsemiconductor substrate was immersed in the detergent compositions “A”to “H”, “J” and “K” for 6 minutes, it was washed with pure water for oneminute to execute elemental analysis on a silicon semiconductorsubstrate surface dried using X-ray photoelectron spectroscopy device,and analyze a content of silicon.

Measurement device: AXIS-Ultra DLD manufactured by Kratos AnalyticalLimited.

TABLE 1 Compara- Compara- Compara- Compara- Exam- Exam- Exam- Exam-Exam- Exam- Exam- tive tive tive tive ple 1 ple 2 ple 3 ple 4 ple 5 ple6 ple 7 Example 1 Example 2 Example 3 Example 4 Detergent A B C D E F GH I J K composition TMAH 2 3 TEAH 0.5 0.5 1 2 0.05 0.5 TPAH 1 TBAH 1Water 3 3 0.3 1 1.5 2 3.8 0.95 5 3 Methanol 1.7 47.1 1-butanol 971-hexanol 49 Propylene 4.5 glycol Dipropylene 48.5 glycol 1-propoxy- 9647.1 97 2-propanol 1-butoxy-2- 95 98.5 49 48.5 99 92 95 propanolAppearance ∘ ∘ ∘ ∘ ∘ ∘ ∘ ∘ x ∘ Contact angle ∘ ∘ ∘ ∘∘ ∘∘ ∘∘ ∘ x — xafter cleaning Contact angle 35 32 35 18 25 23 33 85 — 108 63 aftercleaning (angle) content of 4 4 3 <1 1 1 4 20 — 23 17 silicon atom aftercleaning

Table 1 shows that in the Examples 1 to 7 that meet requirements of thesubstrate detergent composition of the present invention, a favorableproperty of cleaning can be obtained with a short period of time,resulting in no corrosion of a substrate.

Meanwhile, in the Comparative Examples 1 to 4 that don't meetrequirements of the substrate detergent composition of the presentinvention, a favorable property of cleaning cannot be obtained,resulting in corrosion of a substrate.

From these observations, it was confirmed that the substrate detergentcomposition of the present invention can obtain a favorable property ofefficiently cleaning a silicon semiconductor substrate with a shortperiod of time without corrosion of a substrate even in a thinsubstrate.

It must be stated here that the present invention is not restricted tothe embodiments shown by Examples. The embodiments shown by Examples aremerely examples so that any embodiments composed of substantially thesame technical concept as disclosed in the claims of the presentinvention and expressing a similar effect are included in the technicalscope of the present invention.

What is claimed is:
 1. A substrate detergent composition used forcleaning a surface of a substrate, comprising: (A) A quaternary ammoniumsalt: 0.1 to 2.0% by mass; (B) Water: 0.1 to 0.4% by mass; and (C) Anorganic solvent: 94.0 to 99.8% by mass.
 2. The substrate detergentcomposition according to claim 1, wherein the substrate to be cleaned isa silicon semiconductor substrate whose water contact angle is 100° ormore.
 3. The substrate detergent composition according to claim 1,wherein the quaternary ammonium salt is tetraalkylammonium hydroxide. 4.The substrate detergent composition according to claim 2, wherein thequaternary ammonium salt is tetraalkylammonium hydroxide.
 5. Thesubstrate detergent composition according to claim 3, wherein thetetraalkylammonium hydroxide is tetraethylammonium hydroxide.
 6. Thesubstrate detergent composition according to claim 4, wherein thetetraalkylammonium hydroxide is tetraethylammonium hydroxide.
 7. Thesubstrate detergent composition according to claim 1, wherein theorganic solvent is an organic solvent containing at least one hydroxylgroup in one molecule and contains at least one kind of a saturatedaliphatic alcohol having 1 to 8 carbon atoms, a glycol having 2 to 16carbon atoms and a glycol ether having 4 to 20 carbon atoms.
 8. Thesubstrate detergent composition according to claim 2, wherein theorganic solvent is an organic solvent containing at least one hydroxylgroup in one molecule and contains at least one kind of a saturatedaliphatic alcohol having 1 to 8 carbon atoms, a glycol having 2 to 16carbon atoms and a glycol ether having 4 to 20 carbon atoms.
 9. Thesubstrate detergent composition according to claim 3, wherein theorganic solvent is an organic solvent containing at least one hydroxylgroup in one molecule and contains at least one kind of a saturatedaliphatic alcohol having 1 to 8 carbon atoms, a glycol having 2 to 16carbon atoms and a glycol ether having 4 to 20 carbon atoms.
 10. Thesubstrate detergent composition according to claim 4, wherein theorganic solvent is an organic solvent containing at least one hydroxylgroup in one molecule and contains at least one kind of a saturatedaliphatic alcohol having 1 to 8 carbon atoms, a glycol having 2 to 16carbon atoms and a glycol ether having 4 to 20 carbon atoms.
 11. Thesubstrate detergent composition according to claim 5, wherein theorganic solvent is an organic solvent containing at least one hydroxylgroup in one molecule and contains at least one kind of a saturatedaliphatic alcohol having 1 to 8 carbon atoms, a glycol having 2 to 16carbon atoms and a glycol ether having 4 to 20 carbon atoms.
 12. Thesubstrate detergent composition according to claim 6, wherein theorganic solvent is an organic solvent containing at least one hydroxylgroup in one molecule and contains at least one kind of a saturatedaliphatic alcohol having 1 to 8 carbon atoms, a glycol having 2 to 16carbon atoms and a glycol ether having 4 to 20 carbon atoms.
 13. Thesubstrate detergent composition according to claim 1, wherein thesubstrate to be cleaned is a thin substrate with thickness of 20 to 100μm.
 14. The substrate detergent composition according to claim 2,wherein the substrate to be cleaned is a thin substrate with thicknessof 20 to 100 μm.
 15. The substrate detergent composition according toclaim 3, wherein the substrate to be cleaned is a thin substrate withthickness of 20 to 100 μm.
 16. The substrate detergent compositionaccording to claim 4, wherein the substrate to be cleaned is a thinsubstrate with thickness of 20 to 100 μm.
 17. The substrate detergentcomposition according to claim 5, wherein the substrate to be cleaned isa thin substrate with thickness of 20 to 100 μm.
 18. The substratedetergent composition according to claim 6, wherein the substrate to becleaned is a thin substrate with thickness of 20 to 100 μm.
 19. Athinning process for a substrate in which a semiconductor circuit isformed comprising: bonding the substrate to a support body using anadhesive; grinding a back side of the substrate; delaminating thesupport body with the adhesive; removing the adhesive remaining on thesubstrate surface using the substrate detergent composition according toclaim
 1. 20. The thinning process for substrate according to claim 19,wherein the adhesive is a silicone-based adhesive.